A Dual-Axis Electrostatically Driven MEMS Microgripper
نویسندگان
چکیده
منابع مشابه
Electrostatically Driven Microgripper
In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...
متن کاملDesign and Analysis of a Novel MEMS Dual Axis Accelerometer
Due to their small size, low weight, low cost and low energy consumption, MEMS (Microelectromechanical Systems) devices have achieved great commercial success in recent decades. MEMS accelerometers have been widely used in automobile airbag deployment systems, inertial navigations, etc. In this paper, the design and simulation of a novel bulk-micromachined capacitive MEMS dual axis acceleromete...
متن کاملReliability assessment of electrostatically driven MEMS devices: based on a pulse-induced charging technique
The charging mechanism of electrostatically driven MEMS devices was investigated. This paper shows experimental results of (i) electrostatic discharge (ESD) experiments, (ii) charging mechanism modelling and (iii) Kelvin probe force microscopy tests. It highlighted dielectric failure signature occurred under ESD events and allowed understanding of the underlying breakdown mechanism. A further s...
متن کاملMicroassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator
This paper describes the process of bonding a MEMS (Micro-ElectroMechanical System) microgripper to the distal end of a robotic manipulator arm using a molten solder bonding technique. This task is part of ongoing work which involves the development of a general microassembly workstation. The goal of this workstation is to construct 3-D microstructures from MEMS subcomponents. The microgrippers...
متن کاملAssessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques
The present work investigates the results of different characterization methods for the dielectric charging phenomenon applicable to metal–insulator–metal (MIM) capacitors and electrostatically actuated microelectro-mechanical-systems (MEMS). The discharge current transients (DCT), thermally stimulated depolarization current (TSDC) and Kelvin probe force microscopy (KPFM) assessment methods hav...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: International Journal of Advanced Robotic Systems
سال: 2014
ISSN: 1729-8814,1729-8814
DOI: 10.5772/59677